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DEFECT EQUILIBRATION AND INTRINSIC STRESS IN UNDOPED HYDROGENATED AMORPHOUS-SILICON

KITSUNO, Y; Cho, Gyuseong; DREWERY, J; HONG, WS; PEREZMENDEZ, V, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.33, no.3A, pp.1261 - 1267, 1994-03

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