Browse by Subject Oxide thin film transistor▼aatomic layer deposition method▼ahydrogen▼arapid thermal process▼alight annealing
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| Roles of hydrogen and effects of light annealing in oxide thin film transistors = 산화물 박막 트랜지스터에서 수소의 역할 및 광 열처리 효과 연구link Nam, Yunyong; Park, Sang-Hee; et al, 한국과학기술원, 2019 |
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