Browse by Subject Nanoimprint Lithography

Showing results 1 to 4 of 4

1
Sub-30 nm Gate Template Fabrication for Nanoimprint Lithography Using Spacer Patterning Technology

Park, Kun-Sik; Baik, Kyu-Ha; Kim, Dong-Pyo; Woo, Jong-Chang; No, Kwang-Sooresearcher; Lee, Ki-Jun; Do, Lee-Mi, JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.11, no.2, pp.1625 - 1628, 2011-02

2
Sub-50 nm Template Fabrications for Nanoimprint Lithography Using Hydrogen Silsesquioxane and Silicon Nitride

Shim, Jae-Yeob; Baek, Kyu-Ha; Park, Kun-Sik; Shin, Hong-Sik; No, Kwang-Sooresearcher; Lee, Ki-Jun; Do, Lee-Mi, JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.10, pp.3628 - 3630, 2010-05

3
나노임프린트 리소그래피에서의 폴리머 레지스트의 변형에 관한 분자 동역학 시뮬레이션

강지훈; 김경웅researcher; 김광섭, 대한기계학회논문집 A, v.29, no.6, pp.852 - 859, 2005-06

4
롤 기반 나노임프린트 리소그래피 시스템 기술

임형준researcher; 이재종; 최기봉; 김기홍; 이성휘, 한국기계가공학회지, v.12, no.5, pp.1 - 8, 2013-10

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