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Improvement of electrical stability of polycrystalline ZnO thin films via intentional post-deposition hydrogen doping Myong, Seung-Yeop; Park, Sang-Il; Lim, Koeng-Su, THIN SOLID FILMS, v.513, pp.148 - 151, 2006-08 |
The effect of the magnetron sputtering gun size on the characteristics of the plasma and CN(x) film deposition Roh, Ki-Min; You, Shin-Jae; Kim, Dae-Woong; Han, Jun-Hee; Kim, Jung-Hyung; Seong, Dae-Jin, THIN SOLID FILMS, v.519, no.20, pp.6649 - 6653, 2011 |
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