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Browse by Subject Cu diffusion barrier material▼amolybdenum-based alloy▼afluorine-free etchant▼aetching residue▼achannel surface dama

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Effects of wet etchant on the Al-doped In-Sn-Zn-O thin-film transistors with Cu/Cu diffusion barrier source-drain = 고이동도 산화물 반도체 구리/구리 확산 방지 전극 박막트랜지스터에 대한 습식 식각액 영향 연구link

Kim, Daeho; Park, Sang-Hee; et al, 한국과학기술원, 2019

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