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Surface morphology control of epitaxial silicon films grown by hot wire chemical vapor deposition using hydrogen dilution Lee, Seung Ryul; Ahn, Kyung Min; Kang, Seung Mo; Ahn, Byung Tae, SOLAR ENERGY MATERIALS AND SOLAR CELLS, v.94, no.3, pp.606 - 611, 2010-03 |
기상유도결정화법 및 Hot-wire CVD 방법을 이용한 대결정립 다결정 Si 박막 성장에 관한 연구 = Growth of large-grained poly-Si film using vapor-induced crystallization and hot-wire CVDlink 강승모; Kang, Seung-Mo; et al, 한국과학기술원, 2012 |
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