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Integration Challenges of Nanoporous Low Dielectric Constant Materials Kim, Taek-Soo; Dauskardt, Reinhold H., IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY, v.9, no.4, pp.509 - 515, 2009-12 |
Surface modification of organic polymer by dual action of extreme ultraviolet/visible-near infrared ultrashort pulses Mocek, T.; Polan, J.; Homer, P.; Jakubczak, K.; Rus, B.; Kim, I Jong; Kim, Chul Min; et al, JOURNAL OF APPLIED PHYSICS, v.105, no.2, 2009-01 |
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