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Lateral Silicon Field-Emission Devices Using Electron Beam Lithography sangyeon han; sun-a yang; taekeun hwang; jongho lee; jong duk lee; hyungcheol shin, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1, v.39, no.5A, pp.2556 - 2559, 2000-05 |
전자선 묘화와 반응성 이온 식각을 이용한 나노구조형성 및 나노구조의 기억소자 제작 = Formation of nano-structure and fabrication of nano-structure memory using E-beam lithography and reactive ion etchinglink 박근숙; Park, Geun-Sook; et al, 한국과학기술원, 1998 |
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