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Modeling, Analysis, and Scheduling of Cluster Tools With Two Independent Arms Tonke, Daniel; Lee, Tae-Eog, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1176 - 1188, 2016-04 |
Scheduling cluster tools for concurrent processing of two wafer types with PM sharing Lee, Jun-Ho; Kim, Hyunjung; Lee, Tae-Eog, INTERNATIONAL JOURNAL OF PRODUCTION RESEARCH, v.53, no.19, pp.6007 - 6022, 2015-10 |
Scheduling Lot Switching Operations for Cluster Tools Lee, Jun-Ho; Kim, Hyunjung; Lee, Tae-Eog, IEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.26, no.4, pp.592 - 601, 2013-11 |
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