Showing results 1 to 1 of 1
An ellipsometric data acquisition method for thin film thickness measurement in real time Ye, Sang-Heon; Kim, Soohyun; Kwak, Yoon Keun; Cho, Hyun Mo; Cho, Yong Jai; Chegal, Won, MEASUREMENT SCIENCE & TECHNOLOGY, v.19, 2008-04 |
Discover