Evolution of electron temperature in low pressure magnetized capacitive plasma

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The evolution of electron temperature in a low pressure magnetized capacitive discharge was investigated under the collisionless electron heating regime. The results showed that while the electron temperature increases monotonously with the magnetic field in previous study [Turner et al., Phys. Rev. Lett. 76, 2069(1996)], the electron temperature in our experiment exhibited nonmonotonic evolution behavior with the magnetic field. This nonmonotonic evolution of the electron temperature with the magnetic field was shown to be a combined effect of suppressing electron resonance heating and enhancing collisional heating while increasing the magnetic field. (C) 2010 American Institute of Physics. [doi: 10.1063/1.3309589]
Publisher
AMER INST PHYSICS
Issue Date
2010-03
Language
English
Article Type
Article
Keywords

GAS-DISCHARGES; RF DISCHARGE; FIELD

Citation

APPLIED PHYSICS LETTERS, v.96, no.10

ISSN
0003-6951
DOI
10.1063/1.3309589
URI
http://hdl.handle.net/10203/99583
Appears in Collection
PH-Journal Papers(저널논문)
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