Evaluation of spectral phase in spectrally resolved white-light interferometry: Comparative study of single-frame techniques

Cited 37 time in webofscience Cited 0 time in scopus
  • Hit : 164
  • Download : 0
Spectral phase in a white-light interferogram contains information about the absolute optical path difference (OPD) in the interferometer. Evaluation of spectral phase is therefore important in applications such as profilometry with white light. In spectrally resolved white-light interferometry (SRWLI) the white-light interferogram is spectrally decomposed by a spectrometer in order to determine this phase. Several single-frame techniques in SRWLI have been proposed for the evaluation of the phase including Fourier transform, Hilbert transform, spatial phase shifting, windowed Fourier transform and wavelet transform. In this paper we present a comparative study of these techniques in this application in relation to the temporal phase-shifting technique which is a multi- frame method. Further, we also propose a modified method to remove the influence of source spectrum modulation in Hilbert transform procedure. (C) 2009 Elsevier Ltd. All rights reserved.
Publisher
ELSEVIER SCI LTD
Issue Date
2009-11
Language
English
Article Type
Article
Keywords

WINDOWED FOURIER-TRANSFORM; FRINGE-PATTERN-ANALYSIS; SHIFTING INTERFEROMETRY; WAVELET-TRANSFORM; ROUGH SURFACES; PROFILOMETRY; INTERFEROGRAMS; ALGORITHM; ORDER; IDENTIFICATION

Citation

OPTICS AND LASERS IN ENGINEERING, v.47, no.11, pp.1125 - 1130

ISSN
0143-8166
DOI
10.1016/j.optlaseng.2009.06.014
URI
http://hdl.handle.net/10203/97096
Appears in Collection
ME-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 37 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0