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College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Journal Papers(저널논문)

Spectrally resolved phase-shifting interference microscopy: technique based on optical coherence tomography for profiling a transparent film on a patterned substrate

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dc.contributor.authorDebnath, Sanjit K.ko
dc.contributor.authorKim, Seung-Wooko
dc.contributor.authorKothiyal, Mahendra P.ko
dc.contributor.authorHariharan, Parameswaranko
dc.date.accessioned2013-03-09T15:56:52Z-
dc.date.available2013-03-09T15:56:52Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2010-12-
dc.identifier.citationAPPLIED OPTICS, v.49, no.34, pp.6624 - 6629-
dc.identifier.issn0003-6935-
dc.identifier.urihttp://hdl.handle.net/10203/96795-
dc.description.abstractSpectrally resolved white-light phase-shifting interference microscopy has been used for measurements of the thickness profile of a transparent thin-film layer deposited upon a patterned structure exhibiting steps and discontinuities. We describe a simple technique, using an approach based on spectrally resolved optical coherence tomography, that makes it possible to obtain directly a thickness profile along a line by inverse Fourier transformation of the complex spectral interference function. (C) 2010 Optical Society of America-
dc.languageEnglish-
dc.publisherOPTICAL SOC AMER-
dc.subjectWHITE-LIGHT INTERFEROMETRY-
dc.subjectACOUSTOOPTIC TUNABLE FILTER-
dc.subjectSTEP-HEIGHT MEASUREMENT-
dc.subjectTHICKNESS-PROFILE-
dc.subjectPROFILOMETRY-
dc.subjectINTERFEROGRAMS-
dc.subjectRANGE-
dc.titleSpectrally resolved phase-shifting interference microscopy: technique based on optical coherence tomography for profiling a transparent film on a patterned substrate-
dc.typeArticle-
dc.identifier.wosid000284830500017-
dc.identifier.scopusid2-s2.0-78650427193-
dc.type.rimsART-
dc.citation.volume49-
dc.citation.issue34-
dc.citation.beginningpage6624-
dc.citation.endingpage6629-
dc.citation.publicationnameAPPLIED OPTICS-
dc.identifier.doi10.1364/AO.49.006624-
dc.contributor.localauthorKim, Seung-Woo-
dc.contributor.nonIdAuthorDebnath, Sanjit K.-
dc.contributor.nonIdAuthorKothiyal, Mahendra P.-
dc.contributor.nonIdAuthorHariharan, Parameswaran-
dc.type.journalArticleArticle-
dc.subject.keywordPlusWHITE-LIGHT INTERFEROMETRY-
dc.subject.keywordPlusACOUSTOOPTIC TUNABLE FILTER-
dc.subject.keywordPlusSTEP-HEIGHT MEASUREMENT-
dc.subject.keywordPlusTHICKNESS-PROFILE-
dc.subject.keywordPlusPROFILOMETRY-
dc.subject.keywordPlusINTERFEROGRAMS-
dc.subject.keywordPlusRANGE-
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ME-Journal Papers(저널논문)
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