A millimeter-range flexure-based nano-positioning stage using a self-guided displacement amplification mechanism

Cited 100 time in webofscience Cited 0 time in scopus
  • Hit : 577
  • Download : 0
We propose a mechanism for a single-axis flexure-based nano-positioning stage. A self-guided displacement amplification mechanism enables a large range of motion-up to a millimeter-with a compact stage size. Our device has a skewed double-compound parallelogram structure that acts as a motion guide and provides displacement amplification, thereby eliminating a serial connection. Its structural symmetry improves positioning accuracy by reducing parasitic motion error and thermal deformation. A millimeter-range piezo-actuated nano-positioning stage is implemented using the self-guided displacement amplification mechanism. The stage was designed using design optimization frameworks to obtain the highest fundamental resonance frequency under constraints for predetermined travel range, stress, and size. The effectiveness of the proposed mechanism is experimentally verified. Also, we demonstrate that the fabricated stage has superior volume efficency compared to other stages of similar size. (C) 2011 Elsevier Ltd. All rights reserved.
Publisher
PERGAMON-ELSEVIER SCIENCE LTD
Issue Date
2012-04
Language
English
Article Type
Article
Keywords

OPTIMAL-DESIGN; HINGE; OPTIMIZATION; SCANNER

Citation

MECHANISM AND MACHINE THEORY, v.50, pp.109 - 120

ISSN
0094-114X
DOI
10.1016/j.mechmachtheory.2011.11.012
URI
http://hdl.handle.net/10203/96524
Appears in Collection
ME-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 100 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0