Effects of Sol-Gel Organic-Inorganic Hybrid Passivation on Stability of Solution-Processed Zinc Tin Oxide Thin Film Transistors

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We fabricated solution-processed zinc tin oxide (ZTO) TFTs with sol-gel organic-inorganic hybrid passivation layers owing to their solution-processibility and good water and oxygen barrier property. The sol-gel organic-inorganic hybrid passivation layers reduce hysteresis of the TFTs without deterioration of performance. The gate bias stability and the environmental stability under high temperature and relative humidity are also improved compared to unpassivated and poly(methyl methacrylate) (PMMA) passivated TFTs. (C) 2011 The Electrochemical Society. [DOI: 10.1149/1.3603845] All rights reserved.
Publisher
ELECTROCHEMICAL SOC INC
Issue Date
2011
Language
English
Article Type
Article
Keywords

FABRICATION

Citation

ELECTROCHEMICAL AND SOLID STATE LETTERS, v.14, no.9, pp.375 - 379

ISSN
1099-0062
URI
http://hdl.handle.net/10203/95796
Appears in Collection
MS-Journal Papers(저널논문)
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