Design and Fabrication of Tb3+-Doped Silicon Oxy-Nitride Microdisk for Biosensor Applications

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We report on fabricating Tb-doped SiON microdisks on a Si chip for low-cost all-Si biosensor applications. The 120-nm-thin 10-mu m diameter pedestal-type microdisks were designed and fabricated for optimum biosensing capabilities. Whispering gallery modes of fabricated microdisks were measured via UV top pumping and side-photoluminescence (PL) measurement, and Q-factors of several hundreds were obtained. Using the microdisk resonators to sense streptavidin using biotin functionalization is also demonstrated.
Publisher
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
Issue Date
2011-01
Language
English
Article Type
Article
Keywords

OPTICAL MICROCAVITIES; LABEL-FREE; RESONATOR; CHIP

Citation

IEEE PHOTONICS TECHNOLOGY LETTERS, v.23, no.2, pp.88 - 90

ISSN
1041-1135
DOI
10.1109/LPT.2010.2091268
URI
http://hdl.handle.net/10203/95229
Appears in Collection
NT-Journal Papers(저널논문)
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