Suspended Spiral Inductor and Band-Pass Filter on Thick Anodized Aluminum Oxide

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We make suspended inductors and 2.45 GHz BPFs on the selectively anodized aluminum. The thick anodized alumina is used as the supporting dielectric and it is easily removed by using chemical wet-etching. The thickness of anodized alumina is 80 m and the depth of the total air-cavity is 200 m. The fabricated inductor over an air cavity has a 25% greater Q factor and 21% higher inductance at 2 GHz compared to an inductor on anodized aluminum. The 2.45 GHz BPF adjusting the suspended inductors has 2.8 dB of insertion loss with a narrow bandwidth.
Publisher
IEEE-Inst Electrical Electronics Engineers Inc
Issue Date
2009-10
Language
English
Article Type
Article
Keywords

FABRICATION

Citation

IEEE MICROWAVE AND WIRELESS COMPONENTS LETTERS, v.19, no.10, pp.620 - 622

ISSN
1531-1309
DOI
10.1109/LMWC.2009.2029735
URI
http://hdl.handle.net/10203/94661
Appears in Collection
EE-Journal Papers(저널논문)
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