Facile fabrication of close-packed microlens arrays using photoinduced surface relief structures as templates

Abstract

We demonstrate the cost-effective and facile method of fabricating close- packed microlens arrays using photoinduced two-dimensional (2-D) surface relief structures as original templates. 2-D surface relief structures are produced by successive inscription of two beams interference patterns with different grating vectors on azopolymer films. The employed exposure dose of 1(st) inscription stage and 2(nd) inscription stage are optimized to obtain symmetrical modulation heights. These photoinduced (2-D) surface relief structures on azopolymer films are used directly to mold PDMS, and PDMS molds were then transferred onto photopolymer to imprint microlens arrays. Using this method, tetragonally and hexagonally close-packed microlens arrays are successfully fabricated in rapid and cost-effective way. c 2007 Optical Society of America.