Performance Evaluation of Serial Photolithography Clusters: Queueing Models, Throughput and Workload Sequencing
- Publisher
- IEEE
- Issue Date
- 2006-05
- Language
- ENG
- Citation
Advanced Semiconductor Manufacturing Conference, 2006. ASMC 2006. The 17th Annual SEMI/IEEE, pp.44 - 49
- ISSN
- 1078-8743
- Appears in Collection
- IE-Conference Papers(학술회의논문)
- Files in This Item
- 2007-IEEE%20CASE-Photolithography%20Throughput.pdf(329.81 kB)Download
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