Effect of duty cycle on plasma parameters in the pulsed dc magnetron argon discharge

Abstract

The time-resolved probe measurements of the plasma parameters and the electron energy distribution function are carried out in a unipolar pulsed dc magnetron argon discharge. The cathode target is driven by the 20 kHz midfrequency unipolar dc pulses at three operating modes, such as constant voltage, constant power, and constant current with the duty cycles ranging from 10% to 90%. It is observed that as the duty cycle is reduced, the electron temperature averaged during the pulse-on period rapidly increases irrespective of the operating mode although the average electron density strongly depends on the operating mode. The comparison of the measured electron energy distribution functions shows that the electron heating during the pulse-on period becomes efficient in the pulse operation with short duty cycle, which is closely related to the deep penetration of the high-voltage sheath into the bulk during the pulse-on period.