DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, JW | ko |
dc.contributor.author | Kang, CS | ko |
dc.contributor.author | Kim, JA | ko |
dc.contributor.author | Eom, T | ko |
dc.contributor.author | Cho, M | ko |
dc.contributor.author | Kong, Hong-Jin | ko |
dc.date.accessioned | 2013-03-07T17:14:25Z | - |
dc.date.available | 2013-03-07T17:14:25Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 2007-11 | - |
dc.identifier.citation | OPTICS EXPRESS, v.15, pp.15759 - 15766 | - |
dc.identifier.issn | 1094-4087 | - |
dc.identifier.uri | http://hdl.handle.net/10203/90754 | - |
dc.description.abstract | We report on a novel compact interferometery system for measuring parasitic motions of a precision stage. It is a combination of a Michelson interferometer with an auto-collimator, of which full physical dimension is mere 70 mm x 80 mm x 35 mm (WxLxH) including optical components, photo-detectors, and electronic circuits. Since the beams, which measure displacement and angle, can be directed at the same position on the moving mirror, the system is applicable for testing small nano-stages where commercial interferometers are not able to be used. And thus, errors from nano-scale deformation of the moving mirror can be minimized. We find that the residual errors of linear and angular motion measurements are 2.5 nm in peak-to-peak and 0.2 '', respectively. (c) 2007 Optical Society of America. | - |
dc.language | English | - |
dc.publisher | OPTICAL SOC AMER | - |
dc.subject | NANOMETROLOGY | - |
dc.subject | INTERFEROMETRY | - |
dc.subject | AUTOCOLLIMATOR | - |
dc.subject | NONLINEARITY | - |
dc.subject | PRECISION | - |
dc.title | A compact system for simultaneous measurement of linear and angular displacements of nano-stages | - |
dc.type | Article | - |
dc.identifier.wosid | 000251223900011 | - |
dc.identifier.scopusid | 2-s2.0-36749085861 | - |
dc.type.rims | ART | - |
dc.citation.volume | 15 | - |
dc.citation.beginningpage | 15759 | - |
dc.citation.endingpage | 15766 | - |
dc.citation.publicationname | OPTICS EXPRESS | - |
dc.identifier.doi | 10.1364/OE.15.015759 | - |
dc.contributor.localauthor | Kong, Hong-Jin | - |
dc.contributor.nonIdAuthor | Kim, JW | - |
dc.contributor.nonIdAuthor | Kang, CS | - |
dc.contributor.nonIdAuthor | Kim, JA | - |
dc.contributor.nonIdAuthor | Eom, T | - |
dc.contributor.nonIdAuthor | Cho, M | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | NANOMETROLOGY | - |
dc.subject.keywordPlus | INTERFEROMETRY | - |
dc.subject.keywordPlus | AUTOCOLLIMATOR | - |
dc.subject.keywordPlus | NONLINEARITY | - |
dc.subject.keywordPlus | PRECISION | - |
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