Angle-resolved annular data acquisition method for microellipsometry

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An ellipsometric data acquisition method is introduced to measure the optical properties of sample. It is based on a microellipsometer hardware layout integrated a high numerical aperture objective lens, which is aligned in the normal direction of sample surface. This technique enables to achieve ellipsometric data at multiple incident angle with a sub-mu m probe beam size, moreover real-time measurement is possible due to no moving parts. The experimental results of different SiO2 thin film are demonstrated, also calibration technique is described. (c) 2007 Optical Society of America.
Publisher
OPTICAL SOC AMER
Issue Date
2007-12
Language
English
Article Type
Article
Keywords

BEAM PROFILE REFLECTOMETRY; IMAGING MICROELLIPSOMETRY; ELLIPSOMETRY; SILICON; MICROSCOPY; RESOLUTION

Citation

OPTICS EXPRESS, v.15, no.26, pp.18056 - 18065

ISSN
1094-4087
DOI
10.1364/OE.15.018056
URI
http://hdl.handle.net/10203/89994
Appears in Collection
ME-Journal Papers(저널논문)
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