A novel fabrication technique of FBAR devices for mobile broadband WiMAX applications

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 320
  • Download : 0
In this study, we present a novel fabrication technique of FBAR devices as a feasibility study for mobile broadband WiMAX applications. This novel technique features the formation of very thin-film Cr adhesion layers between W and SiO2 film layers in the Bragg reflectors, particularly to enhance the adhesion in-between. As a result, the resonances were found to occur at 2.7-3.0 GHz. In addition, excellent resonance characteristics were achieved in terms of return loss and Q-factor. This finding indicates that the proposed fabrication technique can be useful for the future mobile WiMAX applications. (C) 2007 Wiley Periodicals, Inc.
Publisher
JOHN WILEY & SONS INC
Issue Date
2008-02
Language
English
Article Type
Article
Citation

MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, v.50, pp.375 - 378

ISSN
0895-2477
DOI
10.1002/mop.23088
URI
http://hdl.handle.net/10203/89648
Appears in Collection
EE-Journal Papers(저널논문)
Files in This Item
There are no files associated with this item.

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0