High-quality solenoid inductor using dielectric film for multichip modules

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For multilayer applications, we made high-quality and easily fabricated solenoid inductors using a dielectric material (UPILEX-S, UBE Industries, Tokyo, Japan). These inductors fabricated on UPILEX-S had a larger Q factor compared to that of a spiral inductor fabricated on a silicon or GaAs substrate. Furthermore, it is possible to, stack these inductors to make multichip modules using solder or gold stud bumps. From the measurement, solenoid inductors fabricated on 50-mu m-thick film showed very high Q factors and stable inductances.
Publisher
IEEE-Inst Electrical Electronics Engineers Inc
Issue Date
2005-06
Language
English
Article Type
Article; Proceedings Paper
Keywords

CHIP

Citation

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, v.53, no.6, pp.2230 - 2234

ISSN
0018-9480
URI
http://hdl.handle.net/10203/88846
Appears in Collection
EE-Journal Papers(저널논문)
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