A Flexure Guided Planar Scanner for Scanning Probe Microscope; Part1: Design and Analysis of Static and Dynamic Properties
- Publisher
- 한국소음진동공학회
- Issue Date
- 2005
- Language
- Korean
- Citation
한국소음진동공학회논문집, v.15, no.6, pp.667 - 673
- ISSN
- 1598-2785
- Appears in Collection
- ME-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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