Frequency-shifting analysis of electrostatically tunable micro-mechanical actuator

Abstract

A numerical approach for eigenvalue analysis of the electrostatically tunable micro-mechanical actuators is presented. An efficient algorithm for calculating the natural frequency shifting in the micromechanical actuators due to applied DC turning voltage is proposed. In the calculations of the coupled field problem, the three-dimensional FEM/BEM approaches and iterative staggered algorithm are employed. The numerical examples for actually fabricated actuators are presented and the numerical analysis results are compared with experimental data.