Recent progress of lithographic micro fabrication by the TPA-induced photopolymerization

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dc.contributor.authorYang, HKko
dc.contributor.authorKim, MSko
dc.contributor.authorKang, SWko
dc.contributor.authorKim, KSko
dc.contributor.authorLee, KSko
dc.contributor.authorPark, SHko
dc.contributor.authorYang, Dong-Yolko
dc.contributor.authorKong, Hong-Jinko
dc.contributor.authorSun, HBko
dc.contributor.authorKawata, Sko
dc.contributor.authorFleitz, Pko
dc.date.accessioned2013-03-04T16:35:11Z-
dc.date.available2013-03-04T16:35:11Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2004-
dc.identifier.citationJOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY, v.17, no.3, pp.385 - 392-
dc.identifier.issn0914-9244-
dc.identifier.urihttp://hdl.handle.net/10203/83287-
dc.description.abstractSeveral different structures of micro-objects were fabricated by two-photon initiated photopolymerization using newly synthesized chromophore whose structures have been engineered for high two-photon activity. A raster graphics type voxel matrix scanning (VMS) scheme allowed fabrication of two-dimensional (2D) micro-object from a bitmap for-mat figure. Using this technique along with the vacuum pressure discrepancy technique, nano-precision polydimethylsiloxane (PDMS) replica has been fabricated from it original PDMS mold that was originally prepared by two-photon initiated photopolymerization of soft-resin. For better result in photonic crystal fabrication, a quantized-pixel laser writing scheme was employed. A complicated sub-micron 3D photonic lattice was fabricated with high reproducibility. In order to enhance physical/mechanical stability of resulting microobject, we have tested a new material system which consists of sol-gel precursor and photocrosslinking of soft-resin. The physical/mechanical stability of micro-object was enhanced greatly by introducing the formation of silica glass interpenetrating network with organic polymer resin.-
dc.languageEnglish-
dc.publisherTECHNICAL ASSOC PHOTOPOLYMERS-
dc.subjectABSORPTION CROSS-SECTIONS-
dc.subject2-PHOTON ABSORPTION-
dc.subject3-DIMENSIONAL MICROFABRICATION-
dc.subjectDITHIENOTHIOPHENE-
dc.subjectMICROSTRUCTURES-
dc.subjectEFFICIENT-
dc.subjectMOLECULES-
dc.subjectSTORAGE-
dc.subjectDESIGN-
dc.subjectDYES-
dc.titleRecent progress of lithographic micro fabrication by the TPA-induced photopolymerization-
dc.typeArticle-
dc.identifier.wosid000222372600006-
dc.identifier.scopusid2-s2.0-3142512453-
dc.type.rimsART-
dc.citation.volume17-
dc.citation.issue3-
dc.citation.beginningpage385-
dc.citation.endingpage392-
dc.citation.publicationnameJOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY-
dc.identifier.doi10.2494/photopolymer.17.385-
dc.contributor.localauthorYang, Dong-Yol-
dc.contributor.localauthorKong, Hong-Jin-
dc.contributor.nonIdAuthorYang, HK-
dc.contributor.nonIdAuthorKim, MS-
dc.contributor.nonIdAuthorKang, SW-
dc.contributor.nonIdAuthorKim, KS-
dc.contributor.nonIdAuthorLee, KS-
dc.contributor.nonIdAuthorPark, SH-
dc.contributor.nonIdAuthorSun, HB-
dc.contributor.nonIdAuthorKawata, S-
dc.contributor.nonIdAuthorFleitz, P-
dc.type.journalArticleArticle-
dc.subject.keywordAuthortwo-photon absorption-
dc.subject.keywordAuthortwo-photon initiated photopolymerization-
dc.subject.keywordAuthor3D microfabrication-
dc.subject.keywordPlusABSORPTION CROSS-SECTIONS-
dc.subject.keywordPlus2-PHOTON ABSORPTION-
dc.subject.keywordPlus3-DIMENSIONAL MICROFABRICATION-
dc.subject.keywordPlusDITHIENOTHIOPHENE-
dc.subject.keywordPlusMICROSTRUCTURES-
dc.subject.keywordPlusEFFICIENT-
dc.subject.keywordPlusMOLECULES-
dc.subject.keywordPlusSTORAGE-
dc.subject.keywordPlusDESIGN-
dc.subject.keywordPlusDYES-
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ME-Journal Papers(저널논문)PH-Journal Papers(저널논문)
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