Fabrication process of a nano-precision polydimethylsiloxane replica using vacuum pressure-difference technique

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A vacuum pressure-difference technique for making a nano-precision replica is investigated for various applications. Master patterns for replication were fabricated using a nano-replication printing (nRP) process. In the nRP process, any picture and pattern can be replicated from a bitmap figure file in the range of several micrometers with resolution of 200 nm. A liquid-state monomer is solidified by two-photon absorption (TPA) induced by a femto-second laser according to a voxel matrix scanning. After polymerization, the remaining monomers were removed simply by using ethanol droplets. And then, a gold metal layer of about 30 nm thickness was deposited on the fabricated master patterns prior to polydimethylsiloxane molding for preventing bonding between the master and the polydimethylsiloxane mold. A few gold particles attached on the polydimethylsiloxane stamp during detaching process were removed by a gold selecting etchant. After fabricating the polydimethylsiloxane mold, a nano-precision polydimethylsiloxane replica was reproduced. More precise replica was produced by the vacuum pressure difference technique that is proposed in this paper. Through this study, direct patterning on a glass plate, replicating a polydimethylsiloxane mold, and reproducing polydimethylsiloxane replica are demonstrated with a vacuum pressure-difference technique for various micro/nano-applications.
Publisher
POLYMER SOC KOREA
Issue Date
2004-07
Language
English
Article Type
Article
Keywords

3-DIMENSIONAL MICROFABRICATION; LASER NANOFABRICATION; PHOTOPOLYMERIZATION; MICROMACHINES

Citation

POLYMER-KOREA, v.28, pp.305 - 313

ISSN
0379-153X
URI
http://hdl.handle.net/10203/83275
Appears in Collection
ME-Journal Papers(저널논문)PH-Journal Papers(저널논문)
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