DC and AC Characteristics of sub-50 nm MOSFETs with Source/Drain-to-Gate Non-overlapped Structure

Abstract

A MOSFET structure with a nonoverlapped source/drain (S/D) to gate region,was proposed to overcome the challenges in sub-50-nm CMOS devices. Key device characteristics were investigated by extensive simulation study. Fringing gate electric field through the spacer induces an inversion layer in the nonoverlap region to act as an extended S/D region. An oxide spacer is used to reduce parasitic gate overlap capacitance. A reasonable amount of inversion electrons was induced under the spacers. Internal physics, speed characteristics, short channel effects, and RF characteristics were studied with the nonoverlap distance at a fixed metallurgical channel length of 40 run. The proposed structure had good drain-induced barrier lowering and V-T rolloff characteristics and showed reasonable intrinsic gate delay and cutoff frequency compared to those of an overlapped structure.