단축 인장에 의한 SU-8박막의 기계적 물성 측정

Abstract

Thin film is one of the most general structures used in micro-electro-mechanical systems (MEMS). To measure the mechanical properties of SU-8 film, tensile testing was adopted which offers not only elastic modulus but also yield strength and plastic deformation by load-displacement curve. Tensile testing system was constructed with linear guided servo motor for actuation, load cell for force measurement and dual microscope for strain measurement.