Characteristics of MOSFET with non-overlapped source-drain to gate

Abstract

A MOSFET structure with non-overlapped source-drain to gate region is proposed to overcome the challenges in sub-0.1 mum CMOS device. Key device characteristics were investigated by extensive simulation study. Fringing gate electric field through the dielectric spacer induces inversion layer in the non-overlap region to act as extended S/D region. Electrons were induced reasonably under the spacer. Internal physics and speed characteristics were studied with the non-overlap distance. The proposed structure had good subthreshold slope and DIBL characteristics compared to those of overlapped structure.