DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Seung-Woo | ko |
dc.contributor.author | Kim, GH | ko |
dc.date.accessioned | 2013-03-03T03:31:33Z | - |
dc.date.available | 2013-03-03T03:31:33Z | - |
dc.date.created | 2012-02-06 | - |
dc.date.created | 2012-02-06 | - |
dc.date.issued | 1999-10 | - |
dc.identifier.citation | APPLIED OPTICS, v.38, no.28, pp.5968 - 5973 | - |
dc.identifier.issn | 0003-6935 | - |
dc.identifier.uri | http://hdl.handle.net/10203/77016 | - |
dc.description.abstract | White-light scanning interferometry is increasingly used for precision profile metrology of engineering surfaces, but its current applications are limited primarily to opaque surfaces with relatively simple optical reflection behavior. A new attempt is made to extend the interferometric method to the thickness-profile measurement of transparent thin-film layers. An extensive frequency-domain analysis of multiple reflection is performed to allow both the top and the bottom interfaces of a thin-film layer to be measured independently at the same time by the nonlinear least-squares technique. This rigorous approach provides not only point-by-point thickness probing but also complete volumetric film profiles digitized in three dimensions. (C) 1999 Optical Society of America. | - |
dc.language | English | - |
dc.publisher | OPTICAL SOC AMER | - |
dc.subject | INTERFEROGRAMS | - |
dc.subject | INTERFERENCE | - |
dc.subject | PROFILOMETRY | - |
dc.subject | REFLECTION | - |
dc.subject | SURFACE | - |
dc.title | Thickness-profile measurement of transparent thin-film layers by white-light scanning interferometry | - |
dc.type | Article | - |
dc.identifier.wosid | 000083079100009 | - |
dc.identifier.scopusid | 2-s2.0-0000188027 | - |
dc.type.rims | ART | - |
dc.citation.volume | 38 | - |
dc.citation.issue | 28 | - |
dc.citation.beginningpage | 5968 | - |
dc.citation.endingpage | 5973 | - |
dc.citation.publicationname | APPLIED OPTICS | - |
dc.contributor.localauthor | Kim, Seung-Woo | - |
dc.contributor.nonIdAuthor | Kim, GH | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | INTERFEROGRAMS | - |
dc.subject.keywordPlus | INTERFERENCE | - |
dc.subject.keywordPlus | PROFILOMETRY | - |
dc.subject.keywordPlus | REFLECTION | - |
dc.subject.keywordPlus | SURFACE | - |
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