A new inside-type segmented coil antenna for uniformity control in a large-area inductively coupled plasma

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It is found that a properly tuned segmented coil system allows external control of the radial plasma density profile in an inside-type, large-area inductively coupled plasma. This coil system is composed of inner and outer coil segments and an external variable inductor. he external variable inductor is used to balance coil currents between the two coil segments for plasma uniformity control. The measured results indicate that radial plasma spread can be controlled and optimized with this external variable inductor.
Publisher
JAPAN J APPLIED PHYSICS
Issue Date
2000-06
Language
English
Article Type
Article
Keywords

FREQUENCY PLASMA; DISCHARGE

Citation

JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.39, no.6A, pp.548 - 550

ISSN
0021-4922
DOI
10.1143/JJAP.39.L548
URI
http://hdl.handle.net/10203/76166
Appears in Collection
PH-Journal Papers(저널논문)
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