Gas phase photoproduction of diatomic metal nitrides during metal nitride laser CVD

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Publisher
Amer Chemical Soc
Issue Date
1999
Language
English
Article Type
Article
Keywords

TITANIUM NITRIDE; THIN-FILMS; PHOTOFRAGMENTS; LUMINESCENCE; TIN; IDENTIFICATION; ZIRCONIUM; PRECURSOR; COMPLEXES; AMMONIA

Citation

INORGANIC CHEMISTRY, v.38, no.9, pp.2238 - 2239

ISSN
0020-1669
DOI
10.1021/ic981365b
URI
http://hdl.handle.net/10203/70448
Appears in Collection
CH-Journal Papers(저널논문)
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