병렬 안테나에 따른 플라즈마원의 균일도 연구Study on the Uniformity of Plasma Density at TCP Using Parallel Antennas
- Publisher
- 한국진공학회
- Issue Date
- 1998-01
- Language
- Korean
- Citation
한국진공학회지, v.7, no.3, pp.273 - 276
- ISSN
- 1225-8822
- Appears in Collection
- PH-Journal Papers(저널논문)
- Files in This Item
- There are no files associated with this item.
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