Five Mirror System Derived from the Numerical Solutions of all Zero 3rd Order Aberrations and Zero 5th Order Spherical Aberrations for DUV Optical Lit

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Publisher
일본응용물리학회
Issue Date
1994-01
Language
English
Citation

JOURNAL OF JAPANESE APPLIED PHYSICS SOCIETY, v.23, no.0, pp.198 - 198

URI
http://hdl.handle.net/10203/62733
Appears in Collection
PH-Journal Papers(저널논문)
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