모든 3차 수차와 5차 구면수차를 제거하여 얻은 극자외선 리소그라피용 5-반사광학계Five mirror system derived fro the numerical solution of all zoro 3rd order aberrations and zero 5th order spherical aberration for DUV optical lithography

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Publisher
한국광학회
Issue Date
1993
Language
Korean
Citation

한국광학회지, v.4, no.4, pp.373 - 376

ISSN
1225-6285
URI
http://hdl.handle.net/10203/62732
Appears in Collection
PH-Journal Papers(저널논문)
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