Browse "IE-Journal Papers(저널논문)" by Subject generalized backward sequence
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| Optimal Scheduling of Transient Cycles for Single-Armed Cluster Tools With Parallel Chambers Kim, Dae-Kyu; Lee, Tae-Eog; Kim, Hyunjung, IEEE TRANSACTIONS ON AUTOMATION SCIENCE AND ENGINEERING, v.13, no.2, pp.1165 - 1175, 2016-04 |
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