DSpace at KOASAS: One-dimensional Spectroscopic Measurement of Patterned Structures Using a Custom-built Spectral Imaging Ellipsometer

DSpace at KOASAS

College of Engineering(공과대학)School of Mechanical and Aerospace Engineering(기계항공공학부)Dept. of Mechanical Engineering(기계공학과)ME-Conference Papers(학술회의논문)

One-dimensional Spectroscopic Measurement of Patterned Structures Using a Custom-built Spectral Imaging Ellipsometer

Cited 0 time in webofscience

Cited 0 time in scopus

Hit : 3738
Download : 696

Export

Chegal, W / Kim, DS / Kim, Soohyun researcher / Cho, YJ / Cho, HM / Lee, YW

Issue Date: 2003-06-24

Language: ENG

Description: 2003 International Conference on Characterization and Metrology for ULSI Technology

Citation: 2003 International conference for Characterization and Metrology for ULSI Technology

URI: http://hdl.handle.net/10203/5257

Appears in Collection: ME-Conference Papers(학술회의논문)

Files in This Item: One_dimensional_Spectroscopic_Measurement_of_Pa...(324.52 kB)Download

Display Full Item Record

qr_code

트윗하기

KOASAS

Knowledge Service Development Team, KAIST 291 Daehak-ro, Yuseong-gu, Daejeon 34141, Republic of Korea. T. 82-42-350-4493 Email. koasas@kaist.ac.kr
Copyright © 2016. Korea Advanced Institute of Science and Technology. All Rights Reserved.

KOASAS

KOASAS

Browse

One-dimensional Spectroscopic Measurement of Patterned Structures Using a Custom-built Spectral Imaging Ellipsometer

KOASAS

Communities & Collections