학위논문(석사) - 한국과학기술원 : 신소재공학과, 2007.2, [ ii, 87 p. ]
접착력; 토플 테스트; 필 테스트; IMP 스퍼터링; 확산방지막; diffusion barrier layer; adhesion; topple test; peel test; IMP sputtering
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