증착변수가 $Al_2O_3$ 화학증착에 미치는 영향에 대한 연구The effects of deposition variables on the chemical vapor deposition of $Al_2O_3$
- Advisors
- 남수우; 천성순; Nam, Soo-Woo; Chun, Sung-Soon
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1982
- Identifier
- 63536/325007 / 000801110
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1982.2, [ [ii], 54 p. ]
- Keywords
Partial pressure.; Preferred orientation.; Supersaturation.
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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