ECR 플라즈마를 이용한 플라즈마 산화에 관한 연구A study on the plasma oxidation using electron cyclotron resonance plasma
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 전자재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1994
- Identifier
- 69531/325007 / 000923266
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1994.2, [ v, 83 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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