ECR-PECVD 법으로 증착된 $Al_2O_3$ 박막의 증착 특성에 관한 연구Deposition characteristics of the ECR-PECVD $Al_2O_3$ thin films
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 전자재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1994
- Identifier
- 69526/325007 / 000923368
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 전자재료공학과, 1994.2, [ ii, 72 p. ]
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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