반응성 스퍼터링법에 의한 $Pb(Zr,Ti)O_3$ 압전 박막의 제조 및 특성평가Preparation and characterization of $Pb(Zr,Ti)O_3$ piezoelectric thin films by reactive sputtering
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이원종 | - |
| dc.contributor.advisor | Lee, Won-Jong | - |
| dc.contributor.author | 김혁환 | - |
| dc.contributor.author | Kim, Hyuk-Hwan | - |
| dc.date.accessioned | 2011-12-15T01:33:55Z | - |
| dc.date.available | 2011-12-15T01:33:55Z | - |
| dc.date.issued | 2001 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=166044&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50837 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 2001.2, [ ix, 85 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 페롭스카이트 | - |
| dc.subject | 스퍼터링 | - |
| dc.subject | 잔류 응력 | - |
| dc.subject | 압전 | - |
| dc.subject | PZT | - |
| dc.subject | perovskite | - |
| dc.subject | sputtering | - |
| dc.subject | residual stress | - |
| dc.subject | piezoelectric | - |
| dc.title | 반응성 스퍼터링법에 의한 $Pb(Zr,Ti)O_3$ 압전 박막의 제조 및 특성평가 | - |
| dc.title.alternative | Preparation and characterization of $Pb(Zr,Ti)O_3$ piezoelectric thin films by reactive sputtering | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 166044/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000993769 | - |
| dc.contributor.localauthor | 이원종 | - |
| dc.contributor.localauthor | Lee, Won-Jong | - |
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