ECR-PEMOCVD법으로 제조한 $SrTiO_3$ 박막의 단차 피복성에 관한 연구A study on the step coverage of $SrTiO_3$ thin films fabricated using ECR-PEMOCVD
- Advisors
- 노광수researcher; No, Kwang-Sooresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 2000
- Identifier
- 158606/325007 / 000983215
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 2000.2, [ vii, 67 p. ]
- Keywords
단차 피복성; ECR-PEMOCVD; 조성; Composition; Step coverage; ECR-PEMOCVD
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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