반응성 스퍼터링 방법으로 PET필름상에 제조한 ITO박막의 전기 및 광학적 특성Electrical and optical properties of Reactive sputtered ITO thin films on PET films
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.advisor | 이택동 | - |
| dc.contributor.advisor | Lee, Taek-Dong | - |
| dc.contributor.author | 김인호 | - |
| dc.contributor.author | Kim, In-Ho | - |
| dc.date.accessioned | 2011-12-15T01:31:51Z | - |
| dc.date.available | 2011-12-15T01:31:51Z | - |
| dc.date.issued | 1999 | - |
| dc.identifier.uri | http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=150058&flag=dissertation | - |
| dc.identifier.uri | http://hdl.handle.net/10203/50712 | - |
| dc.description | 학위논문(석사) - 한국과학기술원 : 재료공학과, 1999.2, [ vii, 60 p. ] | - |
| dc.language | kor | - |
| dc.publisher | 한국과학기술원 | - |
| dc.subject | 기판 바이어스 | - |
| dc.subject | 저온 | - |
| dc.subject | 비정질 | - |
| dc.subject | 반응성 스퍼터 | - |
| dc.subject | Reactive sputtering | - |
| dc.subject | RF bias | - |
| dc.subject | PET | - |
| dc.subject | amorphous ITO | - |
| dc.subject | Low temperature | - |
| dc.title | 반응성 스퍼터링 방법으로 PET필름상에 제조한 ITO박막의 전기 및 광학적 특성 | - |
| dc.title.alternative | Electrical and optical properties of Reactive sputtered ITO thin films on PET films | - |
| dc.type | Thesis(Master) | - |
| dc.identifier.CNRN | 150058/325007 | - |
| dc.description.department | 한국과학기술원 : 재료공학과, | - |
| dc.identifier.uid | 000973147 | - |
| dc.contributor.localauthor | 이택동 | - |
| dc.contributor.localauthor | Lee, Taek-Dong | - |
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.