상부 전극 증착 조건이 $Pb(Zr,Ti)O_3$ 박막의 전기적 특성에 미치는 영향The effects of deposition conditions of top elctrodes on the electrical properties of $Pb(Zr,Ti)O_3$ thin films
- Advisors
- 이원종researcher; Lee, Won-Jongresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1999
- Identifier
- 150054/325007 / 000963420
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1999.2, [ ix, 87 p. ]
- Keywords
백금; 상부 전극; PZT 박막; 강유전체; 수소 유기 열화; Hydrogen-induced degradation; Pt; Top electrode; PZT film; Ferroelectrics
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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