반응성 스퍼터링법으로 제조한 $PbTiO_3$ 박막의 응력분포에 따른 배향성의 변화에 관한 연구 = A study on stress distribution dependence of orientation ratio in $PbTiO_3$ thin film deposited by reactive sputtering

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Advisors
강석중researcherKang, Suk-Joong L.researcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1997
Identifier
113158/325007 / 000953615
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 1997.2, [ iv, 98 p. ]

Keywords

분역구조; 스퍼터링; 응력 분포; 배향도; 유한요소 해석법; FEM; Domain structure; Sputtering; Stress distribution; Orientation ratio

URI
http://hdl.handle.net/10203/50644
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=113158&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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