DC magnetron sputtering으로 증착한 Cr 산화물 박막의 두께 균일도 및 광학적인 특성 분석Analysis on thickness uniformity and optical properties of chromium oxide thin films deposited by DC magnetron sputtering
- Advisors
- 노광수researcher; No, Kwang-Sooresearcher
- Description
- 한국과학기술원 : 재료공학과,
- Publisher
- 한국과학기술원
- Issue Date
- 1996
- Identifier
- 106621/325007 / 000943585
- Language
- kor
- Description
학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ iv, 71 p. ]
- Keywords
메쉬; 흡수계수; 투광성; 위상변이 마스크; 광학적인 성질; 마그네트론; 스퍼터링; 균일도; 산화물; 크롬; Cr; Transmittance; Absorbance; Mesh; Phase shifting mask; Band gap; Optical properties; Chromium oxide; Uniformity; Sputtering; Magnetron
- Appears in Collection
- MS-Theses_Master(석사논문)
- Files in This Item
- There are no files associated with this item.
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