반응성 스퍼터링법에 의해 제조된 PZT박막에 Ta첨가의 영향에 관한 연구 = A study on effects of Ta addition in PZT thin films by reactive sputtering

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Advisors
김호기researcherKim, Ho-Giresearcher
Description
한국과학기술원 : 재료공학과,
Publisher
한국과학기술원
Issue Date
1996
Identifier
106178/325007 / 000943546
Language
kor
Description

학위논문(석사) - 한국과학기술원 : 재료공학과, 1996.2, [ vi, 76 p. ]

Keywords

Ta; 반응성 스퍼터링; PZT; 첨가물; Dopant; Ta; Reactive Sputtering; PZT

URI
http://hdl.handle.net/10203/50585
Link
http://library.kaist.ac.kr/search/detail/view.do?bibCtrlNo=106178&flag=dissertation
Appears in Collection
MS-Theses_Master(석사논문)
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